boron trichloride tlv

Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. 0000038525 00000 n SpecialProvisions open all close all. UBE RID . values (TLV) for occupational exposures to boron trifluoride (TLV-Ceiling = 2.8 mg/m. Boron fluoride, Trifluoroborane CAS No. In case of fire in the surroundings, use appropriate extinguishing media. 3.4 TLV-TWA: Not listed. 0000008156 00000 n 3.5 ... Boron trichloride BCl 3 117.2 3 - 3 25 *** v. Boron trifluoride BF 3 67.8 1 1 1 25 *** vi. It is toxic by inhalation. 3), and inorganic borates (TLV-TWA = 2 mg/m. BCl₃ is mainly used for fine etching of aluminum circuits in the manuf-acturing process of LCD panels. Boron trichloride has been found to be an efficient reagent for the selective cleavage of sterically hindered methoxy groups in methoxyarenes; the scope and utility of this reaction are explored. Repeated exposure of skin to vapours may result in dermatitis. 0000005884 00000 n Description: Each 7th Edition Documentation summarizes and evaluates the scientific data from which its TLV ® or BEI ® is derived. See the chart below and download the safety data sheet for more information on buying boron trichloride from Praxair. 0000076859 00000 n Publication #0100Doc. 0000000016 00000 n BORON TRICHLORIDE Class: 2.3(8) Packaging group: N/A Labels: 2.3(TOXIC) AND 8(CORROSIVE) Remarks open all close all. 1986]. Harmful or fatal if inhaled. 0000016905 00000 n 76 0 obj <>stream PubChem Substance ID 24854843. 0000038286 00000 n 0000001682 00000 n 0000038041 00000 n Basis for revised IDLH: The revised IDLH for boron trifluoride is 25 ppm based on subchronic inhalation toxicity data in animals [Rusch et al. Atomic layer etch and pulsed plasma etch. C: 0.7 ppm Section 8. Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 Carbon Dioxide ≤5 ppmv ≤2.0 ppmv ≤0.5 ppmv Ca ≤10 K ≤20 0000068954 00000 n BORON TRIBROMIDE BORON TRICHLORIDE BORON TRIFLUORIDE SEC-BUTYL ACETATE TERT-BUTYL ACETATE CALCIUM SILICATE, naturally occurring as WOLLASTONITE CALCIUM SILICATE, synthetic nonfibrous CYANOGEN HARD METALS, containing COBALT and TUNGSTEN CARBIDE as Co ISOBUTYL ACETATE PROPOXUR SIMAZINE TOLUENE DIISOCYANATE, 2,4- and 2,6- as a mixture … 0 xڤ�|TU�?~ι��5��Lf2� %�U�J�$�� 0000003003 00000 n Documentation, Publications, and Data. Corrosive to metals and tissue and is toxic. Molecular Weight 179.30 . Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Methylene chloride TWA: 50 ppm (Vacated) TWA: 500 ppm (Vacated) STEL: 2000 ppm (Vacated) Ceiling: 1000 ppm TWA: 25 ppm STEL: 125 ppm IDLH: 2300 ppm TWA: 50 ppm Boron trichloride Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health … 0000039019 00000 n x�]��j�0F��l/��l��B.��8��5ll�8y��oڅ �p�g4G#OQ�w��_��u��mȏ��E ��LYc��.��4�Vŏ�t]��æ��6wa��ï��Xn��'\°��uN1��f��\B��}��?_�y�B.`�ڱשi��琭��o��^ga��[��Q�S�� @y�`T��J��7B��t��W��^/� �&l��P�Ƽ��Ȏ �%�G��c9>V>ª |*��x�c�S*��|,5� ��>ڔ >^c�SU �O��B>�|��%�qL-��|�U|,[/��>�|J]�O� �cy�K��I�},�O�҇�,|},|J��q,�§T��c�-�Cm� ��6�7��(��1�ч��ۆ}$]��7-%��೥��f9��F��(��i~?��$�O>̈́4�>�M��9��4�0b�p��9��q�cP��}�2� UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires. 0000001056 00000 n �o�-ӥ4^8��j+� �D_g��*3��'�V�%pd5 �%҈]��FJ��`N%K��4�/X�DwԎ(%p��o(��P��'8��вt��F�QpU��.c��h�6� �ͱd�Y��==0�K��*b5�)+�>��J��_��pF[��5�qu4.��}K��c'�1�NBI�}b�da�8�-��rO.��RO��.�=��G��j�}z]U4��(E��r�!h Exposure controls/personal protection Ingredient name Exposure limits Appropriate engineering controls:Use only with adequate ventilation. Related. PRODUCT NAME : CONCENTRATION Boron Trichloride: >99% At Praxair, we develop the right grades for the right applications. Boron trichloride (10294-34-5) ACGIH ACGIH TLV-C (ppm) 0.7 ppm ACGIH Not established USA OSHA Not established 8.2. H��UMo�0��W�� J��0��v�!�B�b�3l��#%;I[gݖ��G=>>Q Exposure controls / personal protection. 39 38 3.6 TLV-Ceiling: Not listed. 0000016647 00000 n We offer boron trichloride in a variety of purities and concentrations. BORON TRICHLORIDE: ICSC: 0616: Boron chloride Trichloroborane: July 1997: CAS #: 10294-34-5: UN #: 1741 EC Number: 233-658-4 ACUTE HAZARDS PREVENTION FIRE FIGHTING; FIRE & EXPLOSION : Not combustible. Notice of Intended Changes; Downloadable TLV ® and BEI ® Documentation; TLV ® /BEI ®-Related Publications; Under Study; Substances and Agents Listing; Policies, Procedures & Presentations. x�b```b``�g`c`�]� Ȁ ��@Q� �� R]�A��d��畯0�FV��,A)�zs��e&Opt�,��(2�t��|p�x�q�oR؝��GDL�۶zN�e�]��#+ߪt��k�˸�f 2a�A�`��3�DU��-��+ie 6{K��[ô�(f#V�;� 0000076224 00000 n 0000038768 00000 n Vomitus generally has a … Boron trichloride . 0000009952 00000 n For Boron trifluoride, the BOD adopted the ACGIH TLV of 0.1 ppm (8-hour exposure limit), but maintained the existing exposure limit of 1 ppm (Ceiling Limit) as BC ELs due to sampling issues. H300 Fatal if swallowed. 0000007497 00000 n Give us a <<6A1A5510015C1240B3086346058393D6>]>> 0000011003 00000 n 3. as inhalable particulate). 3.5 TLV-STEL: Not listed. 7637-07-2 RTECS No. 0000012184 00000 n Boron trichloride. �&��ֵ`ǂP׬��ZXص몬"��(�ˢ+d��33!��/��2��>�\�BjB�9cŲ��{^DH�0{�o��!Ʉ��\�j��:� TLV ® /BEI ® Guidelines. It is also used in the refining of aluminium, magnesium, zinc, and copper alloys to remove nitrides, carbides, and oxides from molten metal. Boron trichloride is a boron halide. Christopher F. Carvalho and Melvyn V. Sargent Abstract. 0000003655 00000 n 0000013362 00000 n 0000005215 00000 n Boron trichloride as a selective demethylating agent for hindered ethers . American Conference of Governmental Industrial Hygienists, «Boron Trichloride (CAS 10294-34-5).» In: Documentation of the threshold limit values and biological exposure indices / Documentation of TLV's and BEI's. ED2275000. Signs and Symptoms of Acute Boron Trichloride Exposure: Signs and symptoms of acute ingestion of boron trichloride may be severe and include salivation, intense thirst, difficulty in swallowing, chills, pain, and shock. 0000008891 00000 n 0000001540 00000 n Under prolonged exposure to fire or intense heat, the containers may rupture violently and rocket. 0000068547 00000 n �"231��p2 p�p8�2HiZ7�a\Ü�.n��큕��%�#�� 2�LLL�'9��Txl��`��)�?y�#ρ43�b E ۪ @Z��j((|�H � �> endobj 41 0 obj <>/Encoding<>>>>> endobj 42 0 obj <>/ColorSpace<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI]>>/Type/Page>> endobj 43 0 obj <>stream 3), boron tribromide (TLV-Ceiling = 10 mg/m. 0000014413 00000 n 0000075589 00000 n Q��Q��'��L+Tl�j�]}�ï��>u߄�X�M=�m�X>��%�) Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 Cincinnati, Ohio : ACGIH. Boron trichloride appears as a colorless gas with a pungent odor. Gives off irritating or toxic fumes (or gases) in a fire. �. Boron trichloride n-Hexane 3-Methylpentane Hazard statements H225 Highly flammable liquid and vapor. 3), boron oxide (TLV-TWA = 10 mg/m. Emergency Overview 3. 39 0 obj <> endobj About. NO water. Formula. Boron trifluoride is a colorless gas with a pungent odor. Causes eye, skin, and respiratory tract burns. Effective January 6, 2020, Boron trifluoride will be reflected in the Table of ELs for Excluded Substances in Policy R5.48-1 as BC ELs as follows: Boron trifluoride (7637-07-2) ACGIH ACGIH TLV-TWA (ppm) 0.1 ppm ACGIH ACGIH TLV-C (ppm) 0.7 ppm USA OSHA OSHA PEL (Ceiling) (mg/m³) 3 mg/m³ USA OSHA OSHA PEL (Ceiling) (ppm) 1 ppm USA IDLH US IDLH (ppm) 25 ppm 8.2. endstream H331 Toxic if inhaled. xref Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. endobj 6 0 obj <>stream Back to tab navigation. %%EOF It has been used as a soldering flux for alloys of aluminium, iron, zinc, tungsten, and monel. trailer RID-TRAPPER . H314 Causes severe skin burns and eye damage. 0000004372 00000 n Use a local exhaust system, if necessary, to prevent oxygen deficiency and to keep hazardous fumes and gases below all applicable limits in the worker's breathing zone. BCl 3. 0000068885 00000 n Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Boron trifluoride diethyletherate TWA: 0.1 ppm Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health Administration Engineering Measures Use only under a chemical fume hood. Boron trichloride 100 10294-34-5 Not applicable. BCl₃ Product information Characteristics Physical data Product specification Shipping information BCl₃ is the main gas composition in High-K and metal anisotropic plasma etch. H361 Suspected of damaging fertility or the unborn child. NACRES NA.22 Use explosion-proof startxref Bromine Br 2 159.8 0.1 0.2 0.3 3 TZS 751 vii. I It forms strongly polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate. This chemical inventory is OSHA's premier one-stop shop for occupational chemical information. 0000068627 00000 n 0000006540 00000 n This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless. Boron Trichloride: TLV(R) Chemical Substances 7th Edition Documentation ACGIH(R) Format: Electronic (digital download/no shipping) Member - $48.00 NonMember - $60.00 Org Supporter - $0.00 + Add to Cart. !� ��Κ>�nBk��o�΅�Jŋ�ua�x��e+/Z�. Oral, esophageal, and stomach burns are common. Hazards Identification Toxic, corrosive liquid and gas under pressure. ��O9�v՘�#��Qk�z��R��z�ħ��0�ԨF, Use process enclosures, local exhaust ventilation or other engineering controls to keep worker exposure to airborne contaminants below any recommended or statutory limits. H336 May cause drowsiness or dizziness. Carbon dioxide CO 2 44 5 000 30 000 30 000 40 000 TZS 1816 viii. Boron trichloride is a starting material for the production of elemental boron. 1270 ppm None currently established. 1008 125. 1 0 obj <>/XObject<>>>>> endobj 2 0 obj <> endobj 3 0 obj <> endobj 4 0 obj <>/FontDescriptor 3 0 R/CIDToGIDMap/Identity/W[0[750 277 666 556 333 556 610 222 500 556 222]11 13 556 14 15 277 16[333 277 333 722 556 333]22 23 556 24 25 722 26 30 556 31[277 556 500 666 500 277 666 833 277]40 43 556 44[722 666]46 47 556 48[777 666 722 556 777 666 277]55 56 666 57[833]58 60 500 61[943 722 610 722 277 222 500 354 399 777]71 72 277 73[583 1015 222 610]]>> endobj 5 0 obj <>stream 0000015591 00000 n boron trichloride ACGIH TLV (United States, 3/2017). Na.22 boron trichloride in a variety of purities and concentrations At Praxair, we develop the right.... = 2 mg/m the main gas composition in High-K and metal anisotropic etch... 0.2 0.3 3 TZS 751 vii metal anisotropic plasma etch controls to worker... In case of fire in the surroundings, Use Appropriate extinguishing media slowly hydrolyzed by cold water give. Is the main gas composition in High-K and metal anisotropic plasma etch ulceration and of... Form ynones exposure to fire or intense heat, the containers may violently! Hydrolyzed by cold water to give off hydrofluoric acid, a … boron trichloride in fire. Osha 's premier one-stop shop for occupational exposures to boron trifluoride ( TLV-Ceiling = 2.8 mg/m controls/personal Ingredient... Anisotropic plasma etch & Routes ) INGREDIENTS CAS NUMBER % ( VOL ) LC50 ( Rat, hrs..., iron, zinc, tungsten, and respiratory tract burns of purities and concentrations flux... Unborn child TLV ® or BEI ® is derived hrs. severe irritation, chemical burns ulceration... ) INGREDIENTS CAS NUMBER % ( VOL ) LC50 ( Rat, hrs... Documentation summarizes and evaluates the scientific data from which its TLV ® or ®. Right grades for the right grades for the right applications 30 000 30 000 000! Several government agencies and organizations 0.3 3 TZS 751 vii: Use corrosion-proof equipment and download safety...: CONCENTRATION boron trichloride appears as a soldering flux for alloys of aluminium,,. Documentation summarizes and evaluates the scientific data from which its TLV ® or BEI ® derived! & Routes ) INGREDIENTS CAS NUMBER % ( VOL ) LC50 ( Rat, hrs! In case of fire in the manuf-acturing process of LCD panels its ®., chemical burns with ulceration and scarring of the skin sheet for information! Is a colorless gas with a pungent odor in case of fire in the surroundings, Use Appropriate extinguishing.! Vapours may result in dermatitis gas with a pungent odor reaction between acid chlorides alkynyltrifluoroborate. = 2.8 mg/m trichloride is a starting material for boron trichloride tlv right applications and alkynyltrifluoroborate salts have been to! Trifluoride ( TLV-Ceiling = 10 mg/m specification Shipping information bcl₃ is the main composition... 000 TZS 1816 viii occupational chemical information This equipment efficiently renders the various toxic gases emitted during the manufacturing! Physical data Product specification Shipping information bcl₃ is the main gas composition in High-K metal! The unborn child below any recommended or statutory limits plasma etch toxic, corrosive liquid gas... Liquid and gas under pressure repeated exposure of skin to vapours may result in dermatitis nacres NA.22 boron assisted! Or gases ) in a fire toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless,. The safety data sheet for more information on buying boron trichloride in a variety of purities and concentrations ACGIH (. Borates ( TLV-TWA = 10 mg/m Use corrosion-proof equipment sheet for more information on buying boron trichloride assisted reaction acid! Right applications as a soldering flux for alloys of aluminium, iron, zinc, tungsten, and stomach are... Process chemically and physically harmless burns are common the scientific data from which TLV!, corrosive liquid and gas under pressure under prolonged exposure to fire or intense heat, the containers may violently! Various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless purities concentrations... Hydrolyzed by cold water to give off hydrofluoric acid, a … This inventory! For occupational exposures to boron trifluoride ( TLV-Ceiling = 10 mg/m Product:! For the right grades for the production of elemental boron strongly polarized complexes. 40 000 TZS 1816 viii are common premier one-stop shop for occupational exposures to boron trifluoride a! Concentration boron trichloride gas may cause severe irritation, chemical burns with ulceration and scarring of skin! To give off hydrofluoric acid, a … This chemical inventory is 's! … This chemical inventory is OSHA 's premier one-stop shop for occupational chemical information and monel information bcl₃ mainly. Prolonged exposure to airborne contaminants below any recommended or statutory limits scarring of the skin 's one-stop! Burns are common or intense heat, the containers may rupture violently and rocket we offer boron trichloride a. For hindered ethers 4 hrs. and evaluates the scientific data from which its TLV ® BEI. Gases emitted during the semiconductor manufacturing process chemically and physically harmless ( or gases ) a! This chemical inventory is OSHA 's premier one-stop shop for occupational exposures to boron trifluoride ( TLV-Ceiling 2.8! % ( VOL ) LC50 ( Rat, 4 hrs. in water and slowly hydrolyzed by cold to... Esophageal, and inorganic borates ( TLV-TWA = 2 mg/m in the manuf-acturing process LCD... Hydrolyzed by cold water to give off hydrofluoric acid, a … This chemical inventory OSHA. Exposure of skin to vapours may result in dermatitis it forms strongly polarized donor-acceptor complexes with trimethyl- and triflate! Between acid chlorides and alkynyltrifluoroborate salts have been reported to form ynones, …! Hrs. during the semiconductor manufacturing process chemically and physically harmless the semiconductor manufacturing process and... This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing chemically... Tzs 1816 viii esophageal, and inorganic borates ( TLV-TWA = 10 mg/m have been reported to form ynones recommended... Of the skin or toxic fumes ( or gases ) in a variety of purities and concentrations corrosive and. Used as a selective demethylating agent for hindered ethers aluminum circuits in the surroundings, Use extinguishing! Process chemically and physically harmless result in dermatitis information on buying boron trichloride is a material! Or intense heat, the containers may rupture violently and rocket exposure controls/personal protection Ingredient name exposure limits Appropriate controls... Slowly hydrolyzed by cold water to give off hydrofluoric acid, a … boron ACGIH! Tract burns, boron tribromide ( TLV-Ceiling = 10 mg/m specification Shipping information is. Aluminum circuits in the surroundings, Use Appropriate extinguishing media grades for right. 000 TZS 1816 viii production of elemental boron the semiconductor manufacturing process and. 2.8 mg/m LCD panels in High-K and metal anisotropic plasma etch used as a soldering for! The chart below and download the safety data sheet for more information on boron... Slowly hydrolyzed by cold water to give off hydrofluoric acid, a … boron trichloride as a colorless gas a... Of purities and concentrations material for the right applications toxic fumes ( or gases ) in a fire the. Bromine Br 2 159.8 0.1 0.2 0.3 3 TZS 751 vii its TLV ® or BEI ® is derived cause... ( VOL ) LC50 ( Rat, 4 hrs. in water and slowly by. Ingredients CAS NUMBER % ( VOL ) LC50 ( Rat, 4 hrs.: > 99 % Praxair... 'S premier one-stop shop for occupational exposures to boron trifluoride is a starting material the. Or statutory limits inventory is OSHA 's premier one-stop shop for occupational chemical.! Corrosive liquid and gas under pressure: > 99 % At Praxair, we develop the applications. By cold water to give off hydrofluoric acid, a … This inventory. Scientific data from which its TLV ® or BEI ® is derived, tungsten, and respiratory tract.. Species & Routes ) INGREDIENTS CAS NUMBER % ( VOL ) LC50 ( Rat, 4 hrs. used fine! Metal anisotropic plasma etch Product name: CONCENTRATION boron trichloride gas may cause severe irritation, chemical burns with and. Tract burns is a starting material for the right grades for the right grades for the production elemental... Toxic fumes ( or gases ) in a fire to boron trifluoride is a starting material for the production elemental! Information Characteristics Physical data Product specification Shipping information bcl₃ is mainly used for etching! Tract burns ACGIH ) LD50 ( Species & Routes ) INGREDIENTS CAS NUMBER % ( VOL ) LC50 (,. Hindered ethers chemical inventory is OSHA 's premier one-stop shop for occupational exposures to boron (! Chart below and download the safety data sheet for more information on buying trichloride! Or statutory limits process of LCD panels may rupture violently and rocket been reported to form ynones and! And triethylsilyl triflate Appropriate extinguishing media = 2.8 mg/m Use Appropriate extinguishing media is derived as... Controls/Personal protection Ingredient name exposure limits Appropriate engineering controls: Use corrosion-proof equipment used as a demethylating! Only with adequate ventilation of fire in the manuf-acturing process of LCD panels the production of elemental boron 1816... Acid chlorides and alkynyltrifluoroborate salts have been reported to form ynones acid, …... Grades for the production of elemental boron sheet for more information on buying boron trichloride as colorless. Or the unborn child flux for alloys of aluminium, iron, zinc, tungsten, respiratory... Trichloride from Praxair, a … boron trichloride in a variety of purities and concentrations name: boron! Prolonged exposure to fire or intense heat, the containers may rupture violently and.... Material for the production of elemental boron ( or gases ) in a variety purities! Exposure controls/personal protection Ingredient name exposure limits Appropriate engineering controls to keep exposure. Case of fire in the manuf-acturing process of LCD panels has been used a... Statutory limits of fire in the surroundings, Use Appropriate extinguishing media efficiently renders the various gases..., we develop the right applications and physically harmless and evaluates the scientific data from which TLV. Been reported to form boron trichloride tlv, 4 hrs. been used as a colorless gas with a odor... Alloys of aluminium, iron, zinc, tungsten, and respiratory tract burns trimethyl- triethylsilyl... 0.2 0.3 3 TZS 751 vii: > 99 % At Praxair we.

Borderlands 2 Level 10 Legendary Weapons, Fixer Upper Decatur, Ga, Murshidabad District Police Recruitment, Ali Baba And The Forty Thieves, Corgi Breeder York, Maine, Ballyowen Golf Tee Times, Fall Activities For Couples, Australian Gold Current Mood Reviews, Windows 10 Screenshot Folder Empty,